Å×¹âÒº
ËùÊô·ÖÀࣺ CMPÔì³Ì×ÊÁÏ
²úÆ·ÏêÇé
| ²úÆ· | ²úÆ·½éÉÜ | ·ÖÀà | ¹Ø¼ü»úÄÜÃèÊö |
| DP53XX¡¢DP55XX¡¢DP59XXϵÁÐ | ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖжྦྷ¹èµÄÈ¥³ýºÍƽչ»¯£¬ÓµÓи߶ྦྷ¹èÈ¥³ý¿ìÂÊ£¬¸ßÏ¡Êͱȡ¢µÍȱµãÂʵÄÌØµã¡£²úÆ·ÒѾÔÚ´æ´¢Æ÷¼þÁ¿²úÖÐʹÓᣠ| ¶à¾§¹èÅ×¹âÒº | ¹Ìº¬Á¿4%-20%£» Á£¾¶£º60-200 nm£» Poly/OXÒÆ³ýÑ¡Ôñ±È¸ß |
| DP54XX¡¢DP56XX¡¢DP58XXϵÁÐ | ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖжೡ¾°µÄµª»¯¹è±¡Ä¤È¥³ýºÍƽչ»¯£¬ÓµÓеúÐÎЧӦ½¨¸´ÄÜÁ¦Ç¿£¬Õ¤¼«¸ß¶È¾«×¼½ÚÔìµÄÀûÒæ£¬ÔÚÂß¼Æ÷¼þÔì×÷ÖÐ¿í·ºÀûÓᣠ| µª»¯¹èÅ×¹âÒº | ¹Ìº¬Á¿2%-20%£» Á£¾¶£º50-100 nm£» SiN/OXÒÆ³ýÑ¡Ôñ±ÈÊÊÖÐ |
| ZXϵÁÐ | ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнéµç²ã×ÊÁÏ£¨Ñõ»¯¹è£©µÄÈ¥³ýºÍƽչ»¯£¬ÓµÓиßÈ¥³ý¿ìÂÊ£¬¸ßÏ¡Êͱȡ¢µÍȱµãÂʵÄÌØµã¡£²úÆ·ÒѾÔÚ´æ´¢Æ÷¼þÁ¿²úÖÐʹÓᣠ| ½éµç×ÊÁÏÅ×¹âÒº | ¹Ìº¬Á¿3%-20%£¬ Á£¾¶80-150nm£¬ OX±¡Ä¤ÒƳýÂÊ¸ß |
| DP6XXXϵÁÐ | ÔÚ¼¯³Éµç·Ôì×÷ÖУ¬ÓÃÓÚ¹èÆ¬±í±í»¯Ñ§»úеÅ×¹â(CMP)£¬ÓÐÈ¥³ý¿ìÂʸߣ¬±í±íȱµãÂʵ͵ÄÌØµã¡£ | ¹è³Äµ×Å×¹âÒº | ¹Ìº¬Á¿2%-20%£» Á£¾¶£º50-100 nm£» SiÒÆ³ýÂʸߣ» ¾§Ô²È±µãÂÊµÍ |
| DW6XXXϵÁÐ | ´îÔØ×Ô²úÑõ»¯ÂÁÑÐÄ¥Á£×Ó£¬ÓÃÓÚÂß¼Æ÷¼þÔì×÷¹¤ÒÕÖнðÊôÎÙÕ¤¼«×ÊÁϵÄÈ¥³ýºÍƽչ»¯£¬ÓµÓÐ¸ßÆ½Õ¹»¯Ð§ÄÜ£¬¸ßÑ¡Ôñ±È£¬µÍȱµãÂʵÄÌØµã£¬ÒÑÔÚÂß¼Æ÷¼þÁ¿²úÖÐʹÓᣠ| ÎÙÕ¤¼«Å×¹âÒº | ¹Ìº¬Á¿0.01%-0.3%£¬ Á£¾¶60-120nm£¬W£¬TiN£¬OX ÒÆ³ýÂʾù¿ÉÂú×㶨Ô컯ÐèÒª£¬W/OX ÒÆ³ýÑ¡Ôñ±È¸ß |
| DW3XXX¡¢DW5XXXϵÁÐ | ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнðÊôÎÙ×ÊÁϵÄÈ¥³ýºÍƽչ»¯£¬Ñ¡Ôñ±È¿É¿Ø£¬Âú×ãÑ¡Ôñ±È¶¨ÔìÐèÒª£¬µÍȱµãÂÊ£¬ÒѾÔÚÂß¼Æ÷¼þÁ¿²úÖÐʹÓᣠ| ÎÙÅ×¹âÒº | ¹Ìº¬Á¿1%-10%£¬ Á£¾¶60-100nm£¬ W£¬TiN£¬OX ÒÆ³ýÂʾù¿ÉÂú×㶨Ô컯ÐèÒª£¬W/OX ÒÆ³ýÑ¡Ôñ±ÈÊÊÖÐ |
| DBϵÁÐ | ÓÃÓÚ¼¯³Éµç·Ôì×÷Í»¥Á¬¹¤ÒÕÖз´¶Ô²ãµÄÈ¥³ýºÍƽչ»¯£¬Ñ¡ÔñÐÔÅ×¹âÍÓë·´¶Ô²ã£¬¸ßƽ̹¶È¡¢µÍȱµã£¬µÍÇÖÊ´»òµúÐΰ¼ÏÝ¡£ | Í·´¶Ô²ãÅ×¹âÒº | ¹Ìº¬Á¿5~25%£¬ Á£¾¶20-150nm£¬Cu£¬OX£¬BD£¬Ta£¬TaN£¬SiNµÈ±¡Ä¤ÒƳýÂÊ¿ÉÆ¾¾ÝÐèÒª¶¨Ôì |
| DCϵÁÐ | ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнðÊô͵ÄÈ¥³ýºÍƽչ»¯£¬ÓµÓиßÈ¥³ý¿ìÂÊ£¬¸ßÏ¡Êͱȣ¬µÍȱµãµÈÌØµã¡£ | ÍÅ×¹âÒº | ¹Ìº¬Á¿0.5%-2%£¬Á£¾¶30-120nm£»CuÒÆ³ýÂʸߣ»Cu/OXÒÆ³ýÑ¡Ôñ±ÈµÍ |
| ZAϵÁÐ | ´îÔØ×Ô²úÑõ»¯ÂÁÑÐÄ¥Á£×Ó£¬ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнðÊôÂÁÕ¤¼«×ÊÁϵÄÈ¥³ýºÍƽչ»¯½¨¸´£¬ÓµÓÐ¸ßÆ½Õ¹»¯Ð§ÄÜ£¬¸ßÑ¡Ôñ±È£¬µÍȱµãÂʵÄÌØµã¡£²úÆ·ÒѾÔÚÂß¼Æ÷¼þÔì×÷ÖÐʹÓᣠ| ÂÁÕ¤¼«Å×¹âÒº | ¹Ìº¬Á¿0.5%-2%£¬Á£¾¶60-120nm£¬Al £¬TiN£¬OXµÈ±¡Ä¤ÒƳýÂÊ¿ÉÆ¾¾ÝÐèÒª¶¨Ô죬Al/OX ÒÆ³ýÑ¡Ôñ±È¸ß |
| DSϵÁÐ | ´îÔØ×Ô²úÑõ»¯îæÑÐÄ¥Á£×Ó£¬ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖнéµç²ã×ÊÁÏ£¨Ñõ»¯¹è£©µÄÈ¥³ýºÍƽչ»¯£¬STI½á¹¹µÄ¹¹½¨ÖС£ÓµÓиßÑõ»¯¹èÈ¥³ý¿ìÂÊ£¬¸ßƽչ»¯Ð§ÄÜ¡¢µÍµúÐÎЧӦ¡¢µÍȱµãÂʵÄÌØµã¡£ | Ñõ»¯îæÅ×¹âÒº | ¹Ìº¬Á¿0.5%-5%£¬Á£¾¶80-150nm£¬OXÒÆ³ýÂÊ¿ÉÆ¾¾ÝÐèÒª¶¨Ô죬OX/SiNÒÆ³ýÑ¡Ôñ±È¸ß |
| DLSϵÁÐ | CMP slurryÖеÄÖ÷ÌâÔÁÏ£¬½ðÊôÔÓÖʺ¬Á¿µÍ£¬¿í·ºÓÃÓÚǰ¶Î¹¤ÒÕ¼°¸ßÒªÇóµÄ½ðÊô»¥Á¬¹¤ÒÕ¡£ÓµÓÐÓ²¶ÈµÍ£¬¾§Ô²È±µãÂʵ͵ÄÌØµã¡£ | ³¬´¿¹èÄ¥ÁÏ | ¹Ìº¬Á¿15%-21%£¬Á£¾¶35-180nm£»pH 6.5~8.6£»¸÷Ïî½ðÊôÔÓÖÊ£¼20ppb£»¿É¶©ÔìÄ¥ÁÏ¿ÅÁ£Ëù´øµçºÉ |
| DLSBϵÁÐ | ÓÃÓÚ¼¯³Éµç·Ôì×÷¹¤ÒÕÖи÷Ôì³ÌÖÐslurryÉè¼Æ£¬Ìṩ»úеÑÐÄ¥Á¦ÒÔ¼°»¯Ñ§×é·ÖÎü¸½Î»µã£¬¿ÉÓÃ×÷¼±¾çÈ¥³ýÓëÑ¡Ôñ±È½ÚÔì¸ßµÄ³¡¾°¡£ | ¸ß´¿¹èÄ¥ÁÏ | ¹Ìº¬Á¿20-50%; Á£¾¶20~150nm; pH 8~11;ĪÊÏÓ²¶È~6 |
¹Ø¼ü´Ê£ºÅ×¹âÒº
ÉÏÒ»Ìõ£º Å×¹âµæ
ÏÂÒ»Ìõ£º Ï´åªÒº
Å×¹âÒº
Å×¹âÒºÊÇÒ»ÖÖ¿ÅÁ£É¢²¼ÔÈÉ¢µÄ½ºÌå,¿Éʹ¹èƬ±í±í²úÉúÒ»²ãÑõ»¯Ä¤,ÔÙÓÉÅ×¹âÒºÖÐÄ¥Á£½«ÆäÈ¥³ý,´ïµ½Å×¹âÖ÷ÕÅ¡£Í¨³£Å×¹âÒºµÄÁ÷¿ì¡¢Õ³¶È¡¢Î¶ȡ¢³É·Ö¡¢pHÖµµÈ³ÇÊжÔÈ¥³ý³ÉЧÓÐÓ°Ïì¡£
ÓйزúÆ·
¼¯³Éµç·×ÊÁÏ
CMPÔì³Ì×ÊÁÏ
-
Å×¹âµæ
Å×¹âµæÊǺá¿ç¸ß·Ö×Ó»¯Ñ§¡¢¸ß·Ö×ÓÎïÀí¡¢ÓлúºÏ³É¡¢ÒºÌåÁ¦Ñ§¡¢Ä¦²Áѧ¡¢¾«Ãܼӹ¤µÈ¶àѧ¿ÆÁìÓòµÄ¼¼ÊõÃܼ¯ÐͲúÆ·¡£
-
Å×¹âÒº
Å×¹âÒºÊÇÒ»ÖÖ¿ÅÁ£É¢²¼ÔÈÉ¢µÄ½ºÌå,¿Éʹ¹èƬ±í±í²úÉúÒ»²ãÑõ»¯Ä¤,ÔÙÓÉÅ×¹âÒºÖÐÄ¥Á£½«ÆäÈ¥³ý,´ïµ½Å×¹âÖ÷ÕÅ¡£Í¨³£Å×¹âÒºµÄÁ÷¿ì¡¢Õ³¶È¡¢Î¶ȡ¢³É·Ö¡¢pHÖµµÈ³ÇÊжÔÈ¥³ý³ÉЧÓÐÓ°Ïì¡£
-
Ï´åªÒº
ÖØÒªÓÃÓÚÈ¥³ý²ÐÁôÔÚ¾§Ô²±í±íµÄ΢³¾¿ÅÁ£¡¢ÓлúÎï¡¢ÎÞ»úÎï¡¢½ðÊôÀë×Ó¡¢Ñõ»¯ÎïµÈÔÓÖÊ,Âú×㼯³Éµç·Ôì×÷¶ÔÇå½à¶ÈµÄ¼«¸ßÒªÇó,¶Ô¾§Ô²³ö²úµÄÁ¼ÂÊÆðµ½Á˳ÁÒªµÄ×÷Óá£
°ëµ¼ÌåÏȽø·â×°
-
·â×°¹â¿Ì½º
ghiÏßÆØ¹â£»<br> ·Ö±æÂÊ5¦Ìm~10¦Ìm£»<br> ¸²¸Ç¸ß/µÍι̻¯PSPI£»<br> Ĥºñ5¦Ìm~15¦Ìm£»<br> ¹Ì»¯Î¶È200¡æ~400¡æ£»<br> ¾ß±¸ÓÅÒìµÄµçѧ¡¢Á¦Ñ§»úÄܺÍCu¸½×ÅÁ¦
-
һʱ¼üºÏ½º
³£Î¡¢µÍѹÁ¦¼üºÏ£»<br> ¼«Ç¿µÄÄ͸ßÎÂÄÜÁ¦£»<br> 300¡æ³Ö¾ÃÄÍΣ¾1.5h£»<br> ¿É»úе¡¢¼¤¹â½â¼üºÏ£¨248nm/308nm/355nm£©
-
¾§Ô²¼¶¾øÔµ¶Û»¯²ã×ÊÁÏ
¾§Ô²¼¶¶Û»¯²ãPI/PSPI£¬ÊÇÔÚ¾§Ô²¼¶·â×°(WLP)¹¤ÒÕÖÐÀûÓõĹؼü×ÊÁÏ¡£Í¨¹ýÐýÍ¿¡¢ÆØÏÊÃ÷Ó°ÐγÉͼÐλ¯±£»¤²ã¡£¾¸ßι̻¯ºó£¬ÎªÐ¾Æ¬±í±íÌṩÓÅÒìµÄ¶Û»¯±£»¤ºÍÓ¦Á¦»º³å£¬ÓÐЧÌá¸ßÆ÷¼þ¿¿µÃסÐÔ¡£
°ëµ¼ÌåÏÔʾ×ÊÁÏ
OLED
-
YPI
Õ³¶È4000cP~7000cP£»<br> ¹Ìº¬Á¿10%~20%£»<br> Ĥºñ5¦Ìm~15¦Ìm¹Ì»¯Î¶È450¡æ~480¡æ£»<br> 1%ʧ³Áζȣ¾560¡æ£»<br> ¾ß±¸ÓÅÒìµÄÁ¦Ñ§¹âѧ»úÄÜ
-
PSPI
ghiÏßÆØ¹â£»<br> ·Ö±æÂÊ2¦Ìm~3¦Ìm£»<br> ¸²¸Ç¸ß/µÍ¸Ð¹â¶ÈPSPI£»<br> Ĥºñ1¦Ìm~5¦Ìm£»<br> ¹Ì»¯Î¶È250¡æ~280¡æ£»<br> ¾ß±¸ÓÅÒìµÄ¹âѧ¡¢Á¦Ñ§»úÄÜ
-
TFE INK
Õ³¶È20cP~22cP£»<br> Ë®·Ö£¼50ppm£»<br> 395nmUV¹Ì»¯£»<br> Ĥºñ6¦Ìm~15¦Ìm£»<br> ¾ß±¸ÓÅÒìµÄ¹âѧ»úÄÜ
-
BPDL
·Ö±æÂÊ5¦Ìm£»<br> Á£¾¶50~70nm£»<br> ¹Ì»¯Î¶È250¡æ~280¡æ£»<br> Ĥºñ1¦Ìm~5¦Ìm£»<br> OD£¨¹âÃܶȣ©£¾1/¦Ìm
-
ÎÞ·úPSPI
ghiÏßÆØ¹â£»<br> ·Ö±æÂÊ2¦Ìm~3¦Ìm£»<br> ¸²¸Ç¸ß/µÍ¸Ð¹â¶ÈPFAS free PSPI£»<br> Ĥºñ1¦Ìm~5¦Ìm£»<br> ¹Ì»¯Î¶È250¡æ~280¡æ£»<br> ¾ß±¸ÓÅÒìµÄ¹âѧ¡¢Á¦Ñ§»úÄÜ